“Semiconductor lithography inspection requires reliable detection of small pattern defects such as bridge, burr, pinch, and contamination. In this study, we propose a two-stage vision-language ...
Space Associates, Inc., a provider of advanced metrology and inspection solutions, announced new machine learning capabilities for its kSA Glass Breakage & Defect Detection tool. The enhancement adds ...
AI plays a role in improving defect capture rate and distinguishing between yield-killing and nuisance defects. New developments in wafer edge inspection are proving essential to bonded wafer yields.
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