Abstract: This paper presents the development and application of a dual-frequency ICP etching system for the fabrication of 3D-IC. The system is designed to address the increasing need for efficient ...
Ask the publishers to restore access to 500,000+ books. An icon used to represent a menu that can be toggled by interacting with this icon. A line drawing of the Internet Archive headquarters building ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results